New materials for micro-scale sensors and actuators

an engineering review

Stephen A. Wilson, Renaud P. J. Jourdain, Qi Zhang, Robert A. Dorey, Chris R. Bowen, Magnus Willander, Qamar Ul Wahab, Magnus Willander, M. Al-hilli Safaa, Omer Nur, Eckhard Quandt, Christer Johansson, Emmanouel Pagounis, Manfred Kohl, Jovan Matovic, Bjorn Samel, Wouter van der Wijngaart, Edwin W. H. Jager, Daniel Carlsson, Zoran Djinovic & 7 others Michael Wegener, Carmen Moldovan, Rodica Iosub, Estefania Abad, Michael Wendlandt, Cristina Rusu, Katrin Persson

    Research output: Contribution to journalReview article

    336 Citations (Scopus)

    Abstract

    This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

    Original languageEnglish
    Pages (from-to)1-129
    Number of pages129
    JournalMaterials Science & Engineering R-Reports
    Volume56
    Issue number1-6
    DOIs
    Publication statusPublished - 2007

    Cite this

    Wilson, S. A., Jourdain, R. P. J., Zhang, Q., Dorey, R. A., Bowen, C. R., Willander, M., ... Persson, K. (2007). New materials for micro-scale sensors and actuators: an engineering review. Materials Science & Engineering R-Reports, 56(1-6), 1-129. https://doi.org/10.1016/j.mser.2007.03.001
    Wilson, Stephen A. ; Jourdain, Renaud P. J. ; Zhang, Qi ; Dorey, Robert A. ; Bowen, Chris R. ; Willander, Magnus ; Wahab, Qamar Ul ; Willander, Magnus ; Safaa, M. Al-hilli ; Nur, Omer ; Quandt, Eckhard ; Johansson, Christer ; Pagounis, Emmanouel ; Kohl, Manfred ; Matovic, Jovan ; Samel, Bjorn ; van der Wijngaart, Wouter ; Jager, Edwin W. H. ; Carlsson, Daniel ; Djinovic, Zoran ; Wegener, Michael ; Moldovan, Carmen ; Iosub, Rodica ; Abad, Estefania ; Wendlandt, Michael ; Rusu, Cristina ; Persson, Katrin. / New materials for micro-scale sensors and actuators : an engineering review. In: Materials Science & Engineering R-Reports. 2007 ; Vol. 56, No. 1-6. pp. 1-129.
    @article{81f04a0b52d94705bae665b3320a0283,
    title = "New materials for micro-scale sensors and actuators: an engineering review",
    abstract = "This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.",
    author = "Wilson, {Stephen A.} and Jourdain, {Renaud P. J.} and Qi Zhang and Dorey, {Robert A.} and Bowen, {Chris R.} and Magnus Willander and Wahab, {Qamar Ul} and Magnus Willander and Safaa, {M. Al-hilli} and Omer Nur and Eckhard Quandt and Christer Johansson and Emmanouel Pagounis and Manfred Kohl and Jovan Matovic and Bjorn Samel and {van der Wijngaart}, Wouter and Jager, {Edwin W. H.} and Daniel Carlsson and Zoran Djinovic and Michael Wegener and Carmen Moldovan and Rodica Iosub and Estefania Abad and Michael Wendlandt and Cristina Rusu and Katrin Persson",
    year = "2007",
    doi = "10.1016/j.mser.2007.03.001",
    language = "English",
    volume = "56",
    pages = "1--129",
    journal = "Materials Science & Engineering R-Reports",
    issn = "0927-796X",
    publisher = "Elsevier",
    number = "1-6",

    }

    Wilson, SA, Jourdain, RPJ, Zhang, Q, Dorey, RA, Bowen, CR, Willander, M, Wahab, QU, Willander, M, Safaa, MA, Nur, O, Quandt, E, Johansson, C, Pagounis, E, Kohl, M, Matovic, J, Samel, B, van der Wijngaart, W, Jager, EWH, Carlsson, D, Djinovic, Z, Wegener, M, Moldovan, C, Iosub, R, Abad, E, Wendlandt, M, Rusu, C & Persson, K 2007, 'New materials for micro-scale sensors and actuators: an engineering review', Materials Science & Engineering R-Reports, vol. 56, no. 1-6, pp. 1-129. https://doi.org/10.1016/j.mser.2007.03.001

    New materials for micro-scale sensors and actuators : an engineering review. / Wilson, Stephen A.; Jourdain, Renaud P. J.; Zhang, Qi; Dorey, Robert A.; Bowen, Chris R.; Willander, Magnus; Wahab, Qamar Ul; Willander, Magnus; Safaa, M. Al-hilli; Nur, Omer; Quandt, Eckhard; Johansson, Christer; Pagounis, Emmanouel; Kohl, Manfred; Matovic, Jovan; Samel, Bjorn; van der Wijngaart, Wouter; Jager, Edwin W. H.; Carlsson, Daniel; Djinovic, Zoran; Wegener, Michael; Moldovan, Carmen; Iosub, Rodica; Abad, Estefania; Wendlandt, Michael; Rusu, Cristina; Persson, Katrin.

    In: Materials Science & Engineering R-Reports, Vol. 56, No. 1-6, 2007, p. 1-129.

    Research output: Contribution to journalReview article

    TY - JOUR

    T1 - New materials for micro-scale sensors and actuators

    T2 - an engineering review

    AU - Wilson, Stephen A.

    AU - Jourdain, Renaud P. J.

    AU - Zhang, Qi

    AU - Dorey, Robert A.

    AU - Bowen, Chris R.

    AU - Willander, Magnus

    AU - Wahab, Qamar Ul

    AU - Willander, Magnus

    AU - Safaa, M. Al-hilli

    AU - Nur, Omer

    AU - Quandt, Eckhard

    AU - Johansson, Christer

    AU - Pagounis, Emmanouel

    AU - Kohl, Manfred

    AU - Matovic, Jovan

    AU - Samel, Bjorn

    AU - van der Wijngaart, Wouter

    AU - Jager, Edwin W. H.

    AU - Carlsson, Daniel

    AU - Djinovic, Zoran

    AU - Wegener, Michael

    AU - Moldovan, Carmen

    AU - Iosub, Rodica

    AU - Abad, Estefania

    AU - Wendlandt, Michael

    AU - Rusu, Cristina

    AU - Persson, Katrin

    PY - 2007

    Y1 - 2007

    N2 - This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

    AB - This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

    U2 - 10.1016/j.mser.2007.03.001

    DO - 10.1016/j.mser.2007.03.001

    M3 - Review article

    VL - 56

    SP - 1

    EP - 129

    JO - Materials Science & Engineering R-Reports

    JF - Materials Science & Engineering R-Reports

    SN - 0927-796X

    IS - 1-6

    ER -