Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays

A. L. Bernassau, S. McKay, D. Hutson, C. E. M. Demore, L. Garcia-Gancedo, T. W. Button, J. J. McAneny, Sandy Cochran

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    8 Citations (Scopus)

    Abstract

    A key issue in the development of ultrasound imaging arrays to operate at frequencies above 30 MHz is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires planar, parallel and smooth surfaces. This paper reports an investigation of the surface finishing of 1-3 piezocomposite material by mechanical lapping and/polishing that has demonstrated that excellent surface flatness can be obtained. Subsequently, high frequency array elements have been fabricated on these surfaces using a low temperature lift-off photolithography process. A 50 MHz linear array with 30 pm element pitch has been patterned on the lapped and polished surface of a low frequency 1-3 piezocomposite. Good electrode edge definition and electrical contact to the composite were obtained. Additionally, patterning has been demonstrated on a fine-scale composite, itself suitable for operation above 30 MHz.

    Original languageEnglish
    Title of host publication2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6
    Place of PublicationNew York
    PublisherIEEE Computer Society
    Pages96-99
    Number of pages4
    ISBN (Print)9781424413836
    DOIs
    Publication statusPublished - 2007
    Event2007 IEEE International Ultrasonics Symposium (IUS) - New York, United States
    Duration: 28 Oct 200731 Oct 2007
    http://ewh.ieee.org/conf/ius_2007/

    Conference

    Conference2007 IEEE International Ultrasonics Symposium (IUS)
    Abbreviated title2007 IEEE IUS
    CountryUnited States
    CityNew York
    Period28/10/0731/10/07
    Internet address

    Cite this

    Bernassau, A. L., McKay, S., Hutson, D., Demore, C. E. M., Garcia-Gancedo, L., Button, T. W., ... Cochran, S. (2007). Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays. In 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 (pp. 96-99). New York: IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2007.37
    Bernassau, A. L. ; McKay, S. ; Hutson, D. ; Demore, C. E. M. ; Garcia-Gancedo, L. ; Button, T. W. ; McAneny, J. J. ; Cochran, Sandy. / Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays. 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6. New York : IEEE Computer Society, 2007. pp. 96-99
    @inproceedings{06756e53db86445f8e9aad0733c147e2,
    title = "Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays",
    abstract = "A key issue in the development of ultrasound imaging arrays to operate at frequencies above 30 MHz is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires planar, parallel and smooth surfaces. This paper reports an investigation of the surface finishing of 1-3 piezocomposite material by mechanical lapping and/polishing that has demonstrated that excellent surface flatness can be obtained. Subsequently, high frequency array elements have been fabricated on these surfaces using a low temperature lift-off photolithography process. A 50 MHz linear array with 30 pm element pitch has been patterned on the lapped and polished surface of a low frequency 1-3 piezocomposite. Good electrode edge definition and electrical contact to the composite were obtained. Additionally, patterning has been demonstrated on a fine-scale composite, itself suitable for operation above 30 MHz.",
    author = "Bernassau, {A. L.} and S. McKay and D. Hutson and Demore, {C. E. M.} and L. Garcia-Gancedo and Button, {T. W.} and McAneny, {J. J.} and Sandy Cochran",
    year = "2007",
    doi = "10.1109/ULTSYM.2007.37",
    language = "English",
    isbn = "9781424413836",
    pages = "96--99",
    booktitle = "2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6",
    publisher = "IEEE Computer Society",

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    Bernassau, AL, McKay, S, Hutson, D, Demore, CEM, Garcia-Gancedo, L, Button, TW, McAneny, JJ & Cochran, S 2007, Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays. in 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6. IEEE Computer Society, New York, pp. 96-99, 2007 IEEE International Ultrasonics Symposium (IUS), New York, United States, 28/10/07. https://doi.org/10.1109/ULTSYM.2007.37

    Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays. / Bernassau, A. L.; McKay, S.; Hutson, D.; Demore, C. E. M.; Garcia-Gancedo, L.; Button, T. W.; McAneny, J. J.; Cochran, Sandy.

    2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6. New York : IEEE Computer Society, 2007. p. 96-99.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    TY - GEN

    T1 - Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays

    AU - Bernassau, A. L.

    AU - McKay, S.

    AU - Hutson, D.

    AU - Demore, C. E. M.

    AU - Garcia-Gancedo, L.

    AU - Button, T. W.

    AU - McAneny, J. J.

    AU - Cochran, Sandy

    PY - 2007

    Y1 - 2007

    N2 - A key issue in the development of ultrasound imaging arrays to operate at frequencies above 30 MHz is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires planar, parallel and smooth surfaces. This paper reports an investigation of the surface finishing of 1-3 piezocomposite material by mechanical lapping and/polishing that has demonstrated that excellent surface flatness can be obtained. Subsequently, high frequency array elements have been fabricated on these surfaces using a low temperature lift-off photolithography process. A 50 MHz linear array with 30 pm element pitch has been patterned on the lapped and polished surface of a low frequency 1-3 piezocomposite. Good electrode edge definition and electrical contact to the composite were obtained. Additionally, patterning has been demonstrated on a fine-scale composite, itself suitable for operation above 30 MHz.

    AB - A key issue in the development of ultrasound imaging arrays to operate at frequencies above 30 MHz is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires planar, parallel and smooth surfaces. This paper reports an investigation of the surface finishing of 1-3 piezocomposite material by mechanical lapping and/polishing that has demonstrated that excellent surface flatness can be obtained. Subsequently, high frequency array elements have been fabricated on these surfaces using a low temperature lift-off photolithography process. A 50 MHz linear array with 30 pm element pitch has been patterned on the lapped and polished surface of a low frequency 1-3 piezocomposite. Good electrode edge definition and electrical contact to the composite were obtained. Additionally, patterning has been demonstrated on a fine-scale composite, itself suitable for operation above 30 MHz.

    U2 - 10.1109/ULTSYM.2007.37

    DO - 10.1109/ULTSYM.2007.37

    M3 - Conference contribution

    SN - 9781424413836

    SP - 96

    EP - 99

    BT - 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6

    PB - IEEE Computer Society

    CY - New York

    ER -

    Bernassau AL, McKay S, Hutson D, Demore CEM, Garcia-Gancedo L, Button TW et al. Surface preparation of 1-3 piezocomposite material for microfabrication of high frequency transducer arrays. In 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6. New York: IEEE Computer Society. 2007. p. 96-99 https://doi.org/10.1109/ULTSYM.2007.37